High temperature stable [Ir3Si-TaN]/HfLaON CMOS with large work-function difference

C. H. Wu, B. F. Hung, Albert Chin, S. J. Wang, W. J. Chen, X. P. Wang, M. F. Li, C. Zhu, Y. Jin, H. J. Tao, S. C. Chen, M. S. Liang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

26 Citations (Scopus)

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Physics & Astronomy

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