We report the growth of β-Ga2O3 nanowires using a vapor phase transport method and the fabrication of β-Ga 2O3 nanowire gas sensor. The β-Ga2O 3 nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 C. With 300 ppm IPA gas introduced, it was found that measured responses were ?7.5%, 13.5%, and 23% when the sensor was operated at 100 C, 200 C, and 300 C, respectively. It was also found that the responses measured at 300 C were ?9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering