Highly sensitive ZnO nanowire acetone vapor sensor with Au adsorption

Shoou Jinn Chang, Ting Jen Hsueh, I. Cherng Chen, Shang Fu Hsieh, Sheng Po Chang, Cheng Liang Hsu, Yan Ru Lin, Bohr Ran Huang

Research output: Contribution to journalArticlepeer-review

92 Citations (Scopus)


In this study, the growth of high-density single-crystalline ZnO nanowires on patterned ZnO:Ga/ hbox{SiO}-{2}/Si templates was reported. We also adsorbed Au onto nanowire surfaces and fabricated ZnO nanowire acetone vapor sensors. With 200-ppm acetone vapor concentration, it was found that we could enhance the device sensitivities at 300 {\circ} C from 18.5% to 82.5% by Au adsorption. It was also found that measured responses at 300 {\circ}C were around 52%, 61%, 71%, 77%, and 82% when the accumulative acetone vapor concentration reached 5, 10, 50, 100, and 200 ppm, respectively, for the ZnO nanowire sensor with Au adsorption.

Original languageEnglish
Article number4625951
Pages (from-to)754-759
Number of pages6
JournalIEEE Transactions on Nanotechnology
Issue number6
Publication statusPublished - 2008 Nov

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering


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