Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

Ting Jen Hsueh; Shoou Jinn Chang; Cheng Liang Hsu; Yan Ru Lin; I. Cherng Chen

doi:10.1063/1.2757605

Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

Ting Jen Hsueh, Shoou Jinn Chang, Cheng Liang Hsu, Yan Ru Lin, I. Cherng Chen

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

219 Citations (Scopus)

Abstract

The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:GaSi O2 Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 °C and increased from 36.0% to 61.5% at 230 °C.

Original language	English
Article number	053111
Journal	Applied Physics Letters
Volume	91
Issue number	5
DOIs	https://doi.org/10.1063/1.2757605
Publication status	Published - 2007

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2757605

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title = "Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption",

abstract = "The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:GaSi O2 Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 °C and increased from 36.0% to 61.5% at 230 °C.",

author = "Hsueh, {Ting Jen} and Chang, {Shoou Jinn} and Hsu, {Cheng Liang} and Lin, {Yan Ru} and Chen, {I. Cherng}",

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AU - Chang, Shoou Jinn

AU - Hsu, Cheng Liang

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AU - Chen, I. Cherng

PY - 2007

Y1 - 2007

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AB - The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:GaSi O2 Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 °C and increased from 36.0% to 61.5% at 230 °C.

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Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

Abstract

All Science Journal Classification (ASJC) codes

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