Hole Mobility Measurements in Heavily Doped Si1_xGex Strained Layers

Timothy K. Cams, Sang K. Chun, Martin O. Tanner, Kang L. Wang

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47 Citations (Scopus)


Both Hall and drift in-plane mobilities have been measured in compressively strained p-type Si1_xGexlayers grown by both chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). Measurements were taken over the boron doping range of 1018 cm-3to 1020 cm-3with Ge contents of 0 < x < 0.22.The apparent drift mobility is found to increase with increasing Ge content, whereas the Hall mobility decreases for the same samples at all doping levels studied. The Hall factor decreases with increasing Ge content, which may be due to additional scattering mechanisms introduced by Ge along with changes in the valence band structure as a result of strain. In this study we also provide the first report of Hall mobility measurements of deuterium-passivated, heavily doped Si.

Original languageEnglish
Pages (from-to)1273-1281
Number of pages9
JournalIEEE Transactions on Electron Devices
Issue number7
Publication statusPublished - 1994 Jul

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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