TY - JOUR
T1 - Homoepitaxial ZnSe MSM photodetectors with various transparent electrodes
AU - Chang, S. J.
AU - Lin, T. K.
AU - Su, Y. K.
AU - Chiou, Y. Z.
AU - Wang, C. K.
AU - Chang, S. P.
AU - Chang, C. M.
AU - Tang, J. J.
AU - Huang, B. R.
N1 - Funding Information:
This work was supported by National Science Council under contract number NSC-93-2623-7-006-003 and NSC 93-2215-E-218-013.
PY - 2006/2/25
Y1 - 2006/2/25
N2 - Homoepitaxial ZnSe metal-semiconductor-metal (MSM) photodetectors with ITO, TiW and Ni/Au contact electrodes were fabricated. It was found that barrier heights for electrons were 0.66, 0.695 and 0.715 eV for ITO, TiW and Ni/Au on the homoepitaxial ZnSe, respectively. With an incident wavelength of 448 nm, it was found that the maximum responsivities for the homoepitaxial ZnSe MSM photodetectors with ITO, TiW and Ni/Au contact electrodes were 120, 50.6 and 28.1 mA/W, which corresponds to quantum efficiencies of 33.5, 14 and 8%, respectively. For a given bandwidth of 100 Hz and a given bias of 1 V, it was found that the corresponding noise equivalent power of our homoepitaxial ZnSe MSM photodetectors with ITO, TiW and Ni/Au electrodes were 8.14 × 10 -13, 1.73 × 10-12 and 9.25 × 10-13 W, respectively. Furthermore, it was found that the corresponding D * were 8.7 × 1011, 4.09 × 10 11 and 7.65 × 1011 cm Hz0.5 W -1, respectively.
AB - Homoepitaxial ZnSe metal-semiconductor-metal (MSM) photodetectors with ITO, TiW and Ni/Au contact electrodes were fabricated. It was found that barrier heights for electrons were 0.66, 0.695 and 0.715 eV for ITO, TiW and Ni/Au on the homoepitaxial ZnSe, respectively. With an incident wavelength of 448 nm, it was found that the maximum responsivities for the homoepitaxial ZnSe MSM photodetectors with ITO, TiW and Ni/Au contact electrodes were 120, 50.6 and 28.1 mA/W, which corresponds to quantum efficiencies of 33.5, 14 and 8%, respectively. For a given bandwidth of 100 Hz and a given bias of 1 V, it was found that the corresponding noise equivalent power of our homoepitaxial ZnSe MSM photodetectors with ITO, TiW and Ni/Au electrodes were 8.14 × 10 -13, 1.73 × 10-12 and 9.25 × 10-13 W, respectively. Furthermore, it was found that the corresponding D * were 8.7 × 1011, 4.09 × 10 11 and 7.65 × 1011 cm Hz0.5 W -1, respectively.
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U2 - 10.1016/j.mseb.2005.10.009
DO - 10.1016/j.mseb.2005.10.009
M3 - Article
AN - SCOPUS:31144460213
SN - 0921-5107
VL - 127
SP - 164
EP - 168
JO - Materials Science and Engineering: B
JF - Materials Science and Engineering: B
IS - 2-3
ER -