An interesting hydrogen sensor based on a Pt-oxide-Al0.3Ga 0.7As MOS structure is fabricated and studied. The transient response and hydrogen detection sensitivity of the studied device under different hydrogen concentrations, temperature and applied voltages are measured. In addition, the kinetic and thermodynamic properties of hydrogen adsorption are studied and discussed. Experimentally, the studied device shows significant advantages of extremely low hydrogen concentration (15 ppm H2/air) detection capability, high hydrogen detection sensitivity (20 in 9090 ppm H 2/air gas), short response time, wide temperature operating regime and good hydrogen detection ability under bi-directional applied bias. Based on these good properties, therefore, the studied device provides a promise for high-performance solid-state hydrogen sensor applications.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry