Hydrogen sensing performance of a nickel oxide (NiO) thin film-based device

Po Cheng Chou, Huey-Ing Chen, I-Ping Liu, Chun Chia Chen, Jian Kai Liou, Kai Siang Hsu, Wen-Chau Liu

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

An interesting nickel oxide (NiO) thin film-based hydrogen sensor device, prepared by a low-powered (50 W) radio-frequency (RF) sputtering process, is studied and demonstrated. The studied device shows improved performance including a very high hydrogen sensing response ratio (416 (ΔR/R)), an extremely low detecting limit (<50 ppm H 2 /air), a high sensing response speed (7 s), a lower operating temperature (350 °C) and a widespread sensing range of hydrogen concentration (50-10,000 ppm H 2 /air). In addition, the device demonstrates benefits of low cost, easy fabrication and chemical stability. Based on these advantages, therefore, the studied NiO thin film sensor device shows promise for high-performance hydrogen sensing applications.

Original languageEnglish
Pages (from-to)729-734
Number of pages6
JournalInternational Journal of Hydrogen Energy
Volume40
Issue number1
DOIs
Publication statusPublished - 2015 Jan 5

Fingerprint

Nickel oxide
nickel oxides
Oxide films
Thin films
Hydrogen
hydrogen
thin films
sensors
air
operating temperature
Chemical stability
Sensors
radio frequencies
Air
sputtering
Sputtering
fabrication
Fabrication
Costs
Temperature

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Condensed Matter Physics
  • Energy Engineering and Power Technology

Cite this

Chou, Po Cheng ; Chen, Huey-Ing ; Liu, I-Ping ; Chen, Chun Chia ; Liou, Jian Kai ; Hsu, Kai Siang ; Liu, Wen-Chau. / Hydrogen sensing performance of a nickel oxide (NiO) thin film-based device. In: International Journal of Hydrogen Energy. 2015 ; Vol. 40, No. 1. pp. 729-734.
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Hydrogen sensing performance of a nickel oxide (NiO) thin film-based device. / Chou, Po Cheng; Chen, Huey-Ing; Liu, I-Ping; Chen, Chun Chia; Liou, Jian Kai; Hsu, Kai Siang; Liu, Wen-Chau.

In: International Journal of Hydrogen Energy, Vol. 40, No. 1, 05.01.2015, p. 729-734.

Research output: Contribution to journalArticle

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