TY - JOUR
T1 - Hydrogen sensing properties of a GaN/AlGaN-based Schottky diode with a catalytic platinum (Pt) hybrid structure
AU - Chen, Wei Cheng
AU - Niu, Jing Shiuan
AU - Liu, I. Ping
AU - Ke, Bu Yuan
AU - Cheng, Shiou Ying
AU - Liu, Wen Chau
N1 - Funding Information:
This work was partly supported by the Ministry of Science and Technology (MOST) under Contract 108-2221-E006-045. Technical assistance on SEM operation from Miss Hui-Jung Shih at Instrument Center, National Cheng-Kung University is appreciated.
Funding Information:
This work was partly supported by the Ministry of Science and Technology (MOST) under Contract 108-2221-E006-045. Technical assistance on SEM operation from Miss Hui-Jung Shih at Instrument Center, National Cheng-Kung University is appreciated.
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2021/3/15
Y1 - 2021/3/15
N2 - A new hydrogen sensor, based on a Schottky diode incorporated with a GaN/AlGaN heterostructure and catalytic platinum (Pt) hybrid metals, is fabricated and studied. The Pt hybrid metals include an evaporated Pt thin film and Pt nanoparticles (NPs). Pt NPs are formed by a solution-based process and an adequate post annealing treatment. The presence of Pt NPs gives the “spill-over” effect and increases the surface area/volume (SA/V) ratio and catalytic activity of the Pt metal. Hence, the related hydrogen sensing performance can be improved. Experimentally, a very high sensing response of 2.7 × 106 (@1% H2/air) with short response and recovery times of 17 s and 23 s and an extremely low detecting level of 1 ppm H2/air are obtained at 300 K. Widespread detecting ranges on the hydrogen concentration and operating temperature are acquired. Based on the theoretical analyses, an exothermic reaction of the hydrogen adsorption process with an activation energy Ea of 15.47 kJ/mol and an enthalpy change ΔH° of -11.4 kJ/mol for the studied Pt NP/Pt film/GaN/AlGaN device is observed. The studied device is therefore promising for high-performance hydrogen sensing applications.
AB - A new hydrogen sensor, based on a Schottky diode incorporated with a GaN/AlGaN heterostructure and catalytic platinum (Pt) hybrid metals, is fabricated and studied. The Pt hybrid metals include an evaporated Pt thin film and Pt nanoparticles (NPs). Pt NPs are formed by a solution-based process and an adequate post annealing treatment. The presence of Pt NPs gives the “spill-over” effect and increases the surface area/volume (SA/V) ratio and catalytic activity of the Pt metal. Hence, the related hydrogen sensing performance can be improved. Experimentally, a very high sensing response of 2.7 × 106 (@1% H2/air) with short response and recovery times of 17 s and 23 s and an extremely low detecting level of 1 ppm H2/air are obtained at 300 K. Widespread detecting ranges on the hydrogen concentration and operating temperature are acquired. Based on the theoretical analyses, an exothermic reaction of the hydrogen adsorption process with an activation energy Ea of 15.47 kJ/mol and an enthalpy change ΔH° of -11.4 kJ/mol for the studied Pt NP/Pt film/GaN/AlGaN device is observed. The studied device is therefore promising for high-performance hydrogen sensing applications.
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U2 - 10.1016/j.snb.2020.129320
DO - 10.1016/j.snb.2020.129320
M3 - Article
AN - SCOPUS:85098942772
SN - 0925-4005
VL - 331
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
M1 - 129320
ER -