Abstract
A Pd/oxide/InAlAs metal-oxide-semiconductor (MOS) type metamorphic high electron mobility transistor (MHEMT)-based hydrogen sensor is fabricated and investigated. In comparison with the conventional HEMT-based sensors, the MOS MHEMT-based sensor exhibits significantly high sensitivity to the hydrogen. The found hydrogen sensing response is as high as 300%. Using the thermodynamic analysis to estimate the enthalpy value of hydrogen adsorption, the value for the proposed sensor is much lower than that for the other reported HEMT-based sensors. The MHEMT-based sensors are demonstrated to have a relatively fast response as comparing to other HEMT-based ones. The response time of the device is approximately 10 s under exposure to a 1% H2/air gas. Consequently, the performance of the studied sensors shows the promise characteristics for practical applications.
Original language | English |
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Pages (from-to) | 3903-3907 |
Number of pages | 5 |
Journal | International Journal of Hydrogen Energy |
Volume | 35 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2010 Apr |
All Science Journal Classification (ASJC) codes
- Renewable Energy, Sustainability and the Environment
- Fuel Technology
- Condensed Matter Physics
- Energy Engineering and Power Technology