Hydrogen sensing properties of a Pd/oxide/InAlAs metamorphic-based transistor

Tsung Han Tsai, Huey Ing Chen, Tai Yu Chen, Li Yang Chen, Yi Jung Liu, Chien Chang Huang, Kai Siang Hsu, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

A Pd/oxide/InAlAs metal-oxide-semiconductor (MOS) type metamorphic high electron mobility transistor (MHEMT)-based hydrogen sensor is fabricated and investigated. In comparison with the conventional HEMT-based sensors, the MOS MHEMT-based sensor exhibits significantly high sensitivity to the hydrogen. The found hydrogen sensing response is as high as 300%. Using the thermodynamic analysis to estimate the enthalpy value of hydrogen adsorption, the value for the proposed sensor is much lower than that for the other reported HEMT-based sensors. The MHEMT-based sensors are demonstrated to have a relatively fast response as comparing to other HEMT-based ones. The response time of the device is approximately 10 s under exposure to a 1% H2/air gas. Consequently, the performance of the studied sensors shows the promise characteristics for practical applications.

Original languageEnglish
Pages (from-to)3903-3907
Number of pages5
JournalInternational Journal of Hydrogen Energy
Volume35
Issue number8
DOIs
Publication statusPublished - 2010 Apr

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Condensed Matter Physics
  • Energy Engineering and Power Technology

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