ICP etching of sapphire substrates

Y. P. Hsu, S. J. Chang, Y. K. Su, J. K. Sheu, C. H. Kuo, C. S. Chang, S. C. Shei

Research output: Contribution to journalArticlepeer-review

55 Citations (Scopus)

Fingerprint

Dive into the research topics of 'ICP etching of sapphire substrates'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds