Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology

Yu Min Lin; San Lein Wu; Shoou Jinn Chang; Pang Shiu Chen; Chee Wee Liu

Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology

Yu Min Lin, San Lein Wu, Shoou Jinn Chang, Pang Shiu Chen, Chee Wee Liu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Publication status	Published - 2006
Event	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Princeton, NJ, United States Duration: 2006 May 15 → 2006 May 17

Publication series

Name	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Volume	2006

Other

Other	Third International SiGe Technology and Device Meeting, ISTDM 2006
Country/Territory	United States
City	Princeton, NJ
Period	06-05-15 → 06-05-17

All Science Journal Classification (ASJC) codes

Computer Science(all)
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Cite this

Lin, Y. M., Wu, S. L., Chang, S. J., Chen, P. S., & Liu, C. W. (2006). Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology. In Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest [1715963] (Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest; Vol. 2006).

@inproceedings{30d6fe2aeb264db6a4718b4e97f23bd6,

title = "Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology",

author = "Lin, {Yu Min} and Wu, {San Lein} and Chang, {Shoou Jinn} and Chen, {Pang Shiu} and Liu, {Chee Wee}",

year = "2006",

language = "English",

isbn = "1424404614",

series = "Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest",

booktitle = "Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest",

}

Lin, YM, Wu, SL, Chang, SJ, Chen, PS & Liu, CW 2006, Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology. in Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest., 1715963, Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest, vol. 2006, Third International SiGe Technology and Device Meeting, ISTDM 2006, Princeton, NJ, United States, 06-05-15.

Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology. / Lin, Yu Min; Wu, San Lein; Chang, Shoou Jinn et al.

Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest. 2006. 1715963 (Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology

AU - Lin, Yu Min

AU - Wu, San Lein

AU - Chang, Shoou Jinn

AU - Chen, Pang Shiu

AU - Liu, Chee Wee

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?scp=34247472186&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34247472186&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:34247472186

SN - 1424404614

SN - 9781424404612

T3 - Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest

BT - Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest

T2 - Third International SiGe Technology and Device Meeting, ISTDM 2006

Y2 - 15 May 2006 through 17 May 2006

ER -

Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology

Publication series

Other

All Science Journal Classification (ASJC) codes

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Cite this