Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology

Yu Min Lin, San Lein Wu, Shoou-Jinn Chang, Pang Shiu Chen, Chee Wee Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThird International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Publication statusPublished - 2006 Dec 1
EventThird International SiGe Technology and Device Meeting, ISTDM 2006 - Princeton, NJ, United States
Duration: 2006 May 152006 May 17

Publication series

NameThird International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Volume2006

Other

OtherThird International SiGe Technology and Device Meeting, ISTDM 2006
CountryUnited States
CityPrinceton, NJ
Period06-05-1506-05-17

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Cite this

Lin, Y. M., Wu, S. L., Chang, S-J., Chen, P. S., & Liu, C. W. (2006). Imapct of SiN on performance in novel CMOS architecture using substrate strained-SiGe and mechanical strained-si technology. In Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest [1715963] (Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest; Vol. 2006).