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Impact of oxygen annealing on high-k gate stack defects characterized by random telegraph noise
Hsu Feng Chiu, San Lein Wu, Yee Shyi Chang, Shoou Jinn Chang, Jone Fang Chen, Shih Chang Tsai, Che Hua Hsu, Chien Ming Lai, Chia Wei Hsu, Osbert Cheng
Research output: Contribution to journal › Article › peer-review
12
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(Scopus)