Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2011 International Conference on Solid State Device and materials (SSDM’11)
Place of Publication	Nagoya, Japan
Publication status	Published - 2011 Sept 28

Cite this

@inproceedings{dbec4a9b97d146d08e78802fa538ae1d,

title = "Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL",

author = "Chiang, \{Chen Kuo\} and Cheng-Han Wu and Y. Huang and Lin, \{Jun Feng\} and Chin-Lung Yang and Wu, \{J. Y.\} and Shui-Jinn Wang",

year = "2011",

month = sep,

day = "28",

language = "English",

booktitle = "2011 International Conference on Solid State Device and materials (SSDM{\textquoteright}11)",

}

TY - GEN

T1 - Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL

AU - Chiang, Chen Kuo

AU - Wu, Cheng-Han

AU - Huang, Y.

AU - Lin, Jun Feng

AU - Yang, Chin-Lung

AU - Wu, J. Y.

AU - Wang, Shui-Jinn

PY - 2011/9/28

Y1 - 2011/9/28

M3 - Conference contribution

BT - 2011 International Conference on Solid State Device and materials (SSDM’11)

CY - Nagoya, Japan

ER -