Implementation considerations of various virtual metrology algorithms

Yu Chuan Su, Tung Ho Lin, Fan Tien Cheng, Wei Ming Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

In the semiconductor industry, run-to-run (R2R) control is an important technique to improve process capability and further enhance the production yield. As the dimension of electronic device shrinks increasingly, wafer-to-wafer (W2W) advanced process control (APC) becomes essential for critical stages. W2W APC needs to obtain the metrology value of each wafer; however, it will be highly time and cost consuming for obtaining actual metrology value of each wafer by physical measurement. Recently, an efficient and cost-effective approach denoted virtual metrology (VM) was proposed to substitute the actual metrology. To implement VM in W2W APC, both conjecture-accuracy and real-time requirements need to be considered. In this paper, various VM algorithms of back-propagation neural network (BPNN), simple recurrent neural network (SRNN) and multiple regression (MR) are evaluated to see whether they can meet the accuracy and real-time requirements of W2W APC or not. The fifth-generation TFT-LCD CVD process is used to test and verify the requirements. Test results show that both one-hidden-layered BPNN and SRNN VM algorithms can achieve acceptable conjecture accuracy and meet the real-time requirements of semiconductor and TFT-LCD W2W APC applications.

Original languageEnglish
Title of host publicationProceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
Pages276-281
Number of pages6
DOIs
Publication statusPublished - 2007 Dec 1
Event3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007 - Scottsdale, AZ, United States
Duration: 2007 Sep 222007 Sep 25

Publication series

NameProceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Other

Other3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
CountryUnited States
CityScottsdale, AZ
Period07-09-2207-09-25

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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