Implementation of a carbon doped low-k material for 0.18 micron technology

  • Wei Jen Hsia
  • , Wilbur Catabay
  • , Michael Lu
  • , D. C. Perng

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Implementation of a carbon doped low-k material for 0.18 micron technology'. Together they form a unique fingerprint.

Material Science

Keyphrases

Chemical Engineering

Engineering