Imprinting method of non-smooth surface

Franklin Chau-Nan Hong (Inventor), Kuan-Zong Fung (Inventor)

Research output: Patent

Abstract

一種非平整面之壓印方法包含以下步驟:(A)將填充材料填補於一非平整表面之基板的凹陷部位,使基板頂面平整。(B)疊鋪一光阻膜於基板之頂面。(C)將一刻有凹陷之電路佈局且可透光的模板上以遮光材料塗佈於預定部位上。(D)將模板覆蓋於光阻膜之頂面,並施以壓力以將光阻膜上壓印形成一具有電路佈局的凸出部,及無設置電路佈局之凹陷部。(E)以光源曝照互相疊壓之模板與基板,使部分光阻膜產生變化。(F)將模板脫模,由基板頂面移除。(G)將光阻膜之凹陷部洗除,留下具有電路佈局形狀之光阻膜凸出部於基板上。
Original languageEnglish
Patent numberI263119
Publication statusPublished - 1800

Cite this

Hong, F. C-N., & Fung, K-Z. (1800). Imprinting method of non-smooth surface. (Patent No. I263119).