Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

J. R. Dickey; J. L. Davidson; Y. Tzeng

doi:10.1149/1.2097010

Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

J. R. Dickey, J. L. Davidson, Y. Tzeng

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 10¹⁸ Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.

Original language	English
Pages (from-to)	1772-1777
Number of pages	6
Journal	Journal of the Electrochemical Society
Volume	136
Issue number	6
DOIs	https://doi.org/10.1149/1.2097010
Publication status	Published - 1989 Jun

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Materials Chemistry
Surfaces, Coatings and Films
Electrochemistry
Renewable Energy, Sustainability and the Environment

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1149/1.2097010

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@article{f60ce7b71caf4b528298da4cd3eb2259,

title = "Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization",

abstract = "A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.",

author = "Dickey, {J. R.} and Davidson, {J. L.} and Y. Tzeng",

year = "1989",

month = jun,

doi = "10.1149/1.2097010",

language = "English",

volume = "136",

pages = "1772--1777",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

number = "6",

}

TY - JOUR

T1 - Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

AU - Dickey, J. R.

AU - Davidson, J. L.

AU - Tzeng, Y.

PY - 1989/6

Y1 - 1989/6

N2 - A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.

AB - A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.

UR - http://www.scopus.com/inward/record.url?scp=0024682075&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024682075&partnerID=8YFLogxK

U2 - 10.1149/1.2097010

DO - 10.1149/1.2097010

M3 - Article

AN - SCOPUS:0024682075

SN - 0013-4651

VL - 136

SP - 1772

EP - 1777

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 6

ER -

Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

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