Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

J. R. Dickey; J. L. Davidson; Y. Tzeng

doi:10.1149/1.2097010

Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

J. R. Dickey, J. L. Davidson, Y. Tzeng

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 10¹⁸ Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.

Original language	English
Pages (from-to)	1772-1777
Number of pages	6
Journal	Journal of the Electrochemical Society
Volume	136
Issue number	6
DOIs	https://doi.org/10.1149/1.2097010
Publication status	Published - 1989 Jun

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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abstract = "A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.",

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year = "1989",

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