A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Renewable Energy, Sustainability and the Environment
- Surfaces, Coatings and Films
- Materials Chemistry