Improved Dielectric Properties for Anodic Aluminum Oxide Films by Soft/Hard Two-Step Electrolytic Anodization

J. R. Dickey, J. L. Davidson, Y. Tzeng

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Abstract

A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.

Original languageEnglish
Pages (from-to)1772-1777
Number of pages6
JournalJournal of the Electrochemical Society
Volume136
Issue number6
DOIs
Publication statusPublished - 1989 Jun

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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