Abstract
A two-step electrolytic anodization process, denoted as the “soft/hard” process, has been studied as a means of fabricating a high quality dielectric. A layer of porous (soft) anodized aluminum followed by boric acid barrier (hard) anodization produced a dense amorphous aluminum oxide with excellent dielectric properties. Effective dielectric constants of up to 19, bulk resistivities of up to 1018 Ω-cm, and breakdown voltages up to twice that of the hard anodization forming voltage were observed.
Original language | English |
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Pages (from-to) | 1772-1777 |
Number of pages | 6 |
Journal | Journal of the Electrochemical Society |
Volume | 136 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1989 Jun |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Surfaces, Coatings and Films
- Electrochemistry
- Renewable Energy, Sustainability and the Environment