Improved Electrical Stability of Zr-IGZO Thin-Film Transistors with Zr0.85Si0.15O2 Gate Dielectric

Zhi-Kai Zhuang, Shui-Jinn Wang, Sheng Yi Wang, Hsiang Yi Chen, Chun Kai Liao, Sheng Tsang Hsiao, Bing Cheng You, Rong-Ming Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication 2018 International Conference on Solid State Devices and Materials (SSDM’18)
Place of Publication Tokyo, Japan
Publication statusPublished - 2018 Sep 11

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