Improved Performance of n-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O2-rich) Schottky Source

Chien Hsiung Hung; Shui-Jinn Wang; Yen Han Chen; Chien Hung Wu; Chieh Lin; Pang Yi Liu; Yung Chun Tu; Tseng Hsing Lin

Improved Performance of n-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O2-rich) Schottky Source

Chien Hsiung Hung, Shui-Jinn Wang, Yen Han Chen, Chien Hung Wu, Chieh Lin, Pang Yi Liu, Yung Chun Tu, Tseng Hsing Lin

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2015 International Conference on Solid State Devices and Materials (SSDM’15)
Place of Publication	Saporo, Japan
Publication status	Published - 2015 Sept 27

Cite this

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title = "Improved Performance of n-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O2-rich) Schottky Source",

author = "Hung, {Chien Hsiung} and Shui-Jinn Wang and Chen, {Yen Han} and Wu, {Chien Hung} and Chieh Lin and Liu, {Pang Yi} and Tu, {Yung Chun} and Lin, {Tseng Hsing}",

year = "2015",

month = sep,

day = "27",

language = "English",

booktitle = "2015 International Conference on Solid State Devices and Materials (SSDM{\textquoteright}15)",

}

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T1 - Improved Performance of n-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O2-rich) Schottky Source

AU - Hung, Chien Hsiung

AU - Wang, Shui-Jinn

AU - Chen, Yen Han

AU - Wu, Chien Hung

AU - Lin, Chieh

AU - Liu, Pang Yi

AU - Tu, Yung Chun

AU - Lin, Tseng Hsing

PY - 2015/9/27

Y1 - 2015/9/27

M3 - Conference contribution

BT - 2015 International Conference on Solid State Devices and Materials (SSDM’15)

CY - Saporo, Japan

ER -