Improved stability of Co-sputtered Ti-IGZO Channel Thin-Film Transistors with Zr0.85Si0.15O2 Gate Dielectric

Yen Hao-Ping , Shui-Jinn Wang, Chien Hsiung Hung, Nai Sheng Wu, Ying Chi Hung, Cheng-Xiu Lin, Zhi-Kai Zhuang, Ching Yi Chen, Chien Hung Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2017 International Conference on Solid State Devices and Materials (SSDM’17)
Place of PublicationSendai, Japan
Publication statusPublished - 2017 Sep 19

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