Improvement of crystalline and photoluminescence of atomic layer deposited m-plane ZnO epitaxial films by annealing treatment

  • S. Yang
  • , B. H. Lin
  • , C. C. Kuo
  • , H. C. Hsu
  • , W. R. Liu
  • , M. O. Eriksson
  • , P. O. Holtz
  • , C. S. Chang
  • , C. H. Hsu
  • , W. F. Hsieh

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9 Citations (Scopus)

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Engineering