Improvement on the diffusion barrier performance of reactively sputtered Ru-N film by incorporation of Ta

Chun Wei Chen, Jen-Sue Chen, Jiann Shing Jeng

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Improvement on the diffusion barrier performance of reactively sputtered Ru-N film by incorporation of Ta'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds