MEMS process offers many advantages such that the microsystem can be downscaled and can be combined with integrated circuit (IC). This technique has been successfully applied to micromotor, micropump, and microelectric apparatus but there has been existing problems of independent and compact power supply system. Thus this study presents a new electromagnetic rotary microgenerator, mainly consisting of multilayer planar Cu microcoil and multipolar hard magnet of Nd/Fe/B by sintering. The layout of the microgenerator is 9 × 9 × 0.5 mm3 in volume. The preliminary experimental result reveals that this microgenerator with eight magnet poles and four-layer Cu planar microcoil generates an output voltage of 6.914 V at 318.4 Hz frequency. The power is enough for seven LEDs lighting.
|Number of pages||5|
|Journal||Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao|
|Publication status||Published - 2006 Apr|
All Science Journal Classification (ASJC) codes
- Mechanical Engineering