In-plane microgenerator with high energy product magnet

Po Jen Cheng, Sheng Chih Shen, Cheng Tang Pan, Cheng Yu Su, Ci Chang Hsieh, Tsung Tien Wu, Hsiang Chi Liu

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


MEMS process offers many advantages such that the microsystem can be downscaled and can be combined with integrated circuit (IC). This technique has been successfully applied to micromotor, micropump, and microelectric apparatus but there has been existing problems of independent and compact power supply system. Thus this study presents a new electromagnetic rotary microgenerator, mainly consisting of multilayer planar Cu microcoil and multipolar hard magnet of Nd/Fe/B by sintering. The layout of the microgenerator is 9 × 9 × 0.5 mm3 in volume. The preliminary experimental result reveals that this microgenerator with eight magnet poles and four-layer Cu planar microcoil generates an output voltage of 6.914 V at 318.4 Hz frequency. The power is enough for seven LEDs lighting.

Original languageEnglish
Pages (from-to)185-189
Number of pages5
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number2
Publication statusPublished - 2006 Apr

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering


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