In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition

Shiuh Ko JangJean, Ying Lang Wang, Chuan Pu Liu, Weng Sing Hwang, Wei Tsu Tseng, Chi Wen Liu

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)732-737
Number of pages6
JournalJournal of Applied Physics
Issue number1
Publication statusPublished - 2003 Jul 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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