@article{083fe7d7db174e12b672979d36c11e31,
title = "In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition",
author = "JangJean, {Shiuh Ko} and Wang, {Ying Lang} and Liu, {Chuan Pu} and Hwang, {Weng Sing} and Tseng, {Wei Tsu} and Liu, {Chi Wen}",
year = "2003",
month = jul,
day = "1",
doi = "10.1063/1.1578171",
language = "English",
volume = "94",
pages = "732--737",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "1",
}