In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition

Shiuh Ko JangJean; Ying Lang Wang; Chuan Pu Liu; Weng Sing Hwang; Wei Tsu Tseng; Chi Wen Liu

doi:10.1063/1.1578171

In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition

Shiuh Ko JangJean, Ying Lang Wang, Chuan Pu Liu, Weng Sing Hwang, Wei Tsu Tseng, Chi Wen Liu

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	732-737
Number of pages	6
Journal	Journal of Applied Physics
Volume	94
Issue number	1
DOIs	https://doi.org/10.1063/1.1578171
Publication status	Published - 2003 Jul 1

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

Access to Document

10.1063/1.1578171

Cite this

@article{083fe7d7db174e12b672979d36c11e31,

title = "In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition",

author = "JangJean, {Shiuh Ko} and Wang, {Ying Lang} and Liu, {Chuan Pu} and Hwang, {Weng Sing} and Tseng, {Wei Tsu} and Liu, {Chi Wen}",

year = "2003",

month = jul,

day = "1",

doi = "10.1063/1.1578171",

language = "English",

volume = "94",

pages = "732--737",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}

TY - JOUR

T1 - In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition

AU - JangJean, Shiuh Ko

AU - Wang, Ying Lang

AU - Liu, Chuan Pu

AU - Hwang, Weng Sing

AU - Tseng, Wei Tsu

AU - Liu, Chi Wen

PY - 2003/7/1

Y1 - 2003/7/1

UR - http://www.scopus.com/inward/record.url?scp=0042842529&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042842529&partnerID=8YFLogxK

U2 - 10.1063/1.1578171

DO - 10.1063/1.1578171

M3 - Article

AN - SCOPUS:0042842529

SN - 0021-8979

VL - 94

SP - 732

EP - 737

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Cite this