In-situ thermal stability analysis of amorphous carbon films with different sp3 content

Research output: Contribution to journalArticle

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Abstract

A synchronized system integrating Raman spectroscopy and depth-sensing techniques was applied to analyze the microstructure, mechanical properties and surface roughness of amorphous carbon (a-C) films in-situ. This integrated system equipped with a high-temperature chamber coupled with feedback control made it possible to study the temperature effects on the mechanical properties and the microstructure of the films. A series of a-C films with different sp3 content were deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Our study confirms previous results that the thermal stability of the a-C films depends on their sp3 content. The results also show that the structural change is accompanied by a significant increase in the surface roughness. This synchronized characterization technique demonstrates that the film hardness decreases with temperature even before any chemical changes detected using Raman spectroscopy. Moreover, the surface of the films is more sensitive to the temperature compared to the bulk as evidenced by the surface roughness characterization, showing that the surface roughness starts to rise at temperatures lower than for the onset of structural transition in the bulk. Nanoscratch and nanowear tests further support the conclusion that the surface sensitivity to temperature is greater than for the bulk.

Original languageEnglish
Pages (from-to)401-409
Number of pages9
JournalCarbon
Volume130
DOIs
Publication statusPublished - 2018 Apr 1

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Carbon films
Amorphous carbon
Amorphous films
Thermodynamic stability
Surface roughness
Raman spectroscopy
Temperature
Vacuum deposition
Mechanical properties
Microstructure
Thermal effects
Feedback control
Hardness
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

Cite this

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abstract = "A synchronized system integrating Raman spectroscopy and depth-sensing techniques was applied to analyze the microstructure, mechanical properties and surface roughness of amorphous carbon (a-C) films in-situ. This integrated system equipped with a high-temperature chamber coupled with feedback control made it possible to study the temperature effects on the mechanical properties and the microstructure of the films. A series of a-C films with different sp3 content were deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Our study confirms previous results that the thermal stability of the a-C films depends on their sp3 content. The results also show that the structural change is accompanied by a significant increase in the surface roughness. This synchronized characterization technique demonstrates that the film hardness decreases with temperature even before any chemical changes detected using Raman spectroscopy. Moreover, the surface of the films is more sensitive to the temperature compared to the bulk as evidenced by the surface roughness characterization, showing that the surface roughness starts to rise at temperatures lower than for the onset of structural transition in the bulk. Nanoscratch and nanowear tests further support the conclusion that the surface sensitivity to temperature is greater than for the bulk.",
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In-situ thermal stability analysis of amorphous carbon films with different sp3 content. / Rouhani, Mehdi; Hong, Franklin Chau-Nan; Jeng, Yeau-Ren.

In: Carbon, Vol. 130, 01.04.2018, p. 401-409.

Research output: Contribution to journalArticle

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