InAs native oxides prepared by liquid phase oxidation method

Hsien Cheng Lin; Kuan Wei Lee; Chia Hong Hsieh; Yu Chun Cheng; Yeong Her Wang

doi:10.1149/1.3486802

InAs native oxides prepared by liquid phase oxidation method

Hsien Cheng Lin, Kuan Wei Lee, Chia Hong Hsieh, Yu Chun Cheng, Yeong Her Wang

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Using liquid phase oxidation technique to prepare native oxides on InAs is demonstrated. In addition to scanning electron microscope, atomic force microscopy and X-ray photoelectron spectroscopy were used to analyze the surfaces and chemical compositions of the oxides. The chemical composition of the InAs native oxide is a mixture of indium oxide (In₂ O ₃) and arsenic oxide (AS₂O₃). The annealing effects on the oxide properties were also investigated.

Original language	English
Pages (from-to)	G230-G233
Journal	Journal of the Electrochemical Society
Volume	157
Issue number	11
DOIs	https://doi.org/10.1149/1.3486802
Publication status	Published - 2010 Oct 13

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1149/1.3486802

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abstract = "Using liquid phase oxidation technique to prepare native oxides on InAs is demonstrated. In addition to scanning electron microscope, atomic force microscopy and X-ray photoelectron spectroscopy were used to analyze the surfaces and chemical compositions of the oxides. The chemical composition of the InAs native oxide is a mixture of indium oxide (In2 O 3) and arsenic oxide (AS2O3). The annealing effects on the oxide properties were also investigated.",

author = "Lin, {Hsien Cheng} and Lee, {Kuan Wei} and Hsieh, {Chia Hong} and Cheng, {Yu Chun} and Wang, {Yeong Her}",

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T1 - InAs native oxides prepared by liquid phase oxidation method

AU - Lin, Hsien Cheng

AU - Lee, Kuan Wei

AU - Hsieh, Chia Hong

AU - Cheng, Yu Chun

AU - Wang, Yeong Her

PY - 2010/10/13

Y1 - 2010/10/13

N2 - Using liquid phase oxidation technique to prepare native oxides on InAs is demonstrated. In addition to scanning electron microscope, atomic force microscopy and X-ray photoelectron spectroscopy were used to analyze the surfaces and chemical compositions of the oxides. The chemical composition of the InAs native oxide is a mixture of indium oxide (In2 O 3) and arsenic oxide (AS2O3). The annealing effects on the oxide properties were also investigated.

AB - Using liquid phase oxidation technique to prepare native oxides on InAs is demonstrated. In addition to scanning electron microscope, atomic force microscopy and X-ray photoelectron spectroscopy were used to analyze the surfaces and chemical compositions of the oxides. The chemical composition of the InAs native oxide is a mixture of indium oxide (In2 O 3) and arsenic oxide (AS2O3). The annealing effects on the oxide properties were also investigated.

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M3 - Article

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JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 11

ER -

InAs native oxides prepared by liquid phase oxidation method

Abstract

All Science Journal Classification (ASJC) codes

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