Abstract
In this study, 5 nm coherent islands approx. 3.5×1010 cm-2 were successfully grown using APMOCVD at 450°C. Incoherent islands >10 nm occurred possibly due to the low activation energy of dislocated cluster formation at 450°C.
Original language | English |
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Pages (from-to) | 31-32 |
Number of pages | 2 |
Journal | LEOS Summer Topical Meeting |
Publication status | Published - 1999 Jan 1 |
Event | Proceedings of the 1999 IEEE/LEOS Summer Topical Meeting on Nanostructures and Quantum Dots - San Diego, CA, USA Duration: 1999 Jul 26 → 1999 Jul 27 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering