Incident ion characteristics in ionized physical vapor deposition using molecular dynamics simulation

Chi Chuan Hwang, Gwo Jiunn Huang, Shin Pon Ju, Jee Gong Chang

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint Dive into the research topics of 'Incident ion characteristics in ionized physical vapor deposition using molecular dynamics simulation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy