Indium-tin-oxide thin films deposited on polyethylene-terephthalate substrates by substrate-biased RF magnetron sputtering

Engineering & Materials Science

• Tin oxides 100%
• Magnetron sputtering 96%
• Polyethylene terephthalates 93%
• Oxide films 89%
• Thin films 68%
• Substrates 51%
• Electric properties 38%
• Adatoms 34%
• Growth temperature 29%
• Optical properties 22%
• X ray photoelectron spectroscopy 22%
• Crystallinity 22%
• Structural properties 19%
• Kinetic energy 19%
• Ions 16%
• Temperature 7%
• Experiments 6%

Physics & Astronomy

• polyethylene terephthalate 81%
• indium oxides 71%
• tin oxides 69%
• magnetron sputtering 60%
• thin films 37%
• electrical properties 21%
• adatoms 14%
• oxide films 13%
• crystallinity 12%
• transmittance 12%
• photoelectron spectroscopy 11%
• kinetic energy 11%
• optical properties 9%
• electrical resistivity 9%
• ions 6%
• x rays 6%
• temperature 4%

Chemical Compounds

• Magnetron Sputtering 83%
• Electrical Property 40%
• Liquid Film 35%
• Adatoms 29%
• Kinetic Energy 27%
• Transmittance 24%
• Compound Mobility 18%
• Crystallinity 18%
• Optical Property 17%
• X-Ray Photoelectron Spectroscopy 16%
• Amorphous Material 16%
• Ion 9%