Indium-zinc-tin-oxide film prepared by reactive magnetron sputtering for electrochromic applications

Ke Ding Li, Po Wen Chen, Kao Shuo Chang, Sheng Chuan Hsu, Der Jun Jan

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


This paper reports on the fabrication of indium-zinc-tin-oxide (IZTO) transparent conductive film deposited by direct current (DC) reactive magnetron sputtering. The electrical, structural, and optical properties of IZTO film were investigated by Hall measurement, X-ray diffraction (XRD), and optical transmission spectroscopy with various sputtering powers. The IZTO film prepared used power at 100Wshowed the lowest resistivity of 5.2 × 10-4 Ω cm. To accomplish rapid switching and high optical modulation, we have fabricated an electrochromic device (ECD) consisting of an working electrode (WO3 electrode filmdeposited on IZTO/ITO/glass) and a counter-electrode (Pt mesh) in 0.2M LiClO4/PC liquid solution. The device demonstrated an optical contrast of 44% and switching times of 4.6 s and 8.1 s for the coloring and bleaching state, respectively, at the wavelength of 550 nm.

Original languageEnglish
Article number2221
Issue number11
Publication statusPublished - 2018 Nov 8

All Science Journal Classification (ASJC) codes

  • Materials Science(all)


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