Inductively coupled plasma grown semiconductor films for low cost solar cells with improved light-soaking stability

Chang Hong Shen, Jia Min Shieh, Jung Y. Huang, Hao Chung Kuo, Chih Wei Hsu, Bau Tong Dai, Ching Ting Lee, Ci Ling Pan, Fu Liang Yang

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

We investigate the performance of a single-junction amorphous Si (a-Si) solar cell fabricated with inductively coupled plasma (ICP) deposition technique. The high-density plasma resulting from high dissociation capacity of ICP enables good-quality hydrogenated Si films to be synthesized at low temperatures. High-density ICP also promotes the diffusion of reactive radicals on substrates and forms a-Si:H films with low defect density (∼3 × 1015cm-3). We demonstrate single-junction a-Si solar cells with a conversion efficiency of 9.6% and improved light-soaking stability. This low thermal-budget thin-film technique could open up the feasibility of efficient thin film solar cells on flexible substrates.

Original languageEnglish
Article number033510
JournalApplied Physics Letters
Volume99
Issue number3
DOIs
Publication statusPublished - 2011 Jul 18

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint

Dive into the research topics of 'Inductively coupled plasma grown semiconductor films for low cost solar cells with improved light-soaking stability'. Together they form a unique fingerprint.

Cite this