Inertance effects to diffuser micropumps flow rate spectrum

Ngoc Bich Le, Yi Chu Hsu, Mau Sheng Lin, Ling-Sheng Jang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7%. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.

Original languageEnglish
Title of host publication2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
Pages87-96
Number of pages10
DOIs
Publication statusPublished - 2008 Aug 20
Event1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08 - Tainan, Taiwan
Duration: 2008 Jan 62008 Jan 9

Publication series

Name2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
VolumePART A

Other

Other1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08
CountryTaiwan
CityTainan
Period08-01-0608-01-09

Fingerprint

diffusers
flow velocity
Flow rate
parabolas
resonant frequencies
Natural frequencies
Diffusers (fluid)
membrane structures
Membrane structures
Fluids
simulation
output
fluids
Experiments
Circuit simulation
equivalent circuits
Equivalent circuits
finite element method
pumping
Actuators

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

Le, N. B., Hsu, Y. C., Lin, M. S., & Jang, L-S. (2008). Inertance effects to diffuser micropumps flow rate spectrum. In 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008 (pp. 87-96). (2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008; Vol. PART A). https://doi.org/10.1115/MNHT2008-52047
Le, Ngoc Bich ; Hsu, Yi Chu ; Lin, Mau Sheng ; Jang, Ling-Sheng. / Inertance effects to diffuser micropumps flow rate spectrum. 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008. 2008. pp. 87-96 (2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008).
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abstract = "This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7{\%}. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.",
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Le, NB, Hsu, YC, Lin, MS & Jang, L-S 2008, Inertance effects to diffuser micropumps flow rate spectrum. in 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008. 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008, vol. PART A, pp. 87-96, 1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08, Tainan, Taiwan, 08-01-06. https://doi.org/10.1115/MNHT2008-52047

Inertance effects to diffuser micropumps flow rate spectrum. / Le, Ngoc Bich; Hsu, Yi Chu; Lin, Mau Sheng; Jang, Ling-Sheng.

2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008. 2008. p. 87-96 (2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008; Vol. PART A).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7%. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.

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Le NB, Hsu YC, Lin MS, Jang L-S. Inertance effects to diffuser micropumps flow rate spectrum. In 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008. 2008. p. 87-96. (2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008). https://doi.org/10.1115/MNHT2008-52047