TY - GEN

T1 - Inertance effects to diffuser micropumps flow rate spectrum

AU - Le, Ngoc Bich

AU - Hsu, Yi Chu

AU - Lin, Mau Sheng

AU - Jang, Ling Sheng

PY - 2008

Y1 - 2008

N2 - This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7%. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.

AB - This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7%. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.

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U2 - 10.1115/MNHT2008-52047

DO - 10.1115/MNHT2008-52047

M3 - Conference contribution

AN - SCOPUS:49449102088

SN - 0791842924

SN - 9780791842928

T3 - 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008

SP - 87

EP - 96

BT - 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008

T2 - 1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08

Y2 - 6 January 2008 through 9 January 2008

ER -