Influence of deposition conditions on silicon nanoclusters in silicon nitride films grown by laser-assisted CVD method

Tai Cheng Tsai, Li Ren Lou, Ching Ting Lee

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Influence of deposition conditions on silicon nanoclusters in silicon nitride films grown by laser-assisted CVD method'. Together they form a unique fingerprint.

Engineering & Materials Science