Influence of growth temperature on microstructure and mechanical properties of nanocrystalline zirconium carbide films

Engineering & Materials Science

• Growth temperature 100%
• Zirconium 78%
• Carbides 60%
• Microstructure 41%
• Mechanical properties 40%
• Hardness 24%
• Adhesion 18%
• Fracture toughness 18%
• Substrates 14%
• Magnetron sputtering 13%
• Nanoindentation 12%
• X ray diffraction 10%
• Elastic moduli 8%
• Scanning electron microscopy 8%
• Testing 5%

Physics & Astronomy

• zirconium carbides 95%
• mechanical properties 41%
• microstructure 36%
• hardness 24%
• fracture strength 20%
• temperature 18%
• adhesion 17%
• nanostructure (characteristics) 13%
• nanoindentation 10%
• magnetron sputtering 8%
• modulus of elasticity 8%
• scanning electron microscopy 6%
• diffraction 5%
• x rays 4%

Chemical Compounds

• Microstructure 41%
• Liquid Film 29%
• Fracture Toughness 23%
• Magnetron Sputtering 11%
• Scanning Electron Microscopy 6%
• X-Ray Diffraction 5%