TY - GEN
T1 - Influence of pulsed-DC power frequency on mechanical properties and high speed drilling application of a-C:H:Zr-x coatings
AU - Kao, W. H.
AU - Su, Y. L.
AU - Yao, S. H.
AU - Liu, S. H.
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - The a-C:H:Zr-x coatings are deposited on micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering system with pulsed-DC power frequencies in the range 30 kHz to 110 kHz (the x in the term a-C:H:Zr-x is the frequency varied in the deposition process). The hardness of the various coatings is systematically explored. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:Zr-70 coating has the highest hardness (42 GPa), while the a-C:H:Zr-110 coating has the lowest hardness (26 GPa). In addition, it is shown that the a-C:H:Zr-70 coating increases the life of the micro-drill by a factor of three compared to that of an uncoated micro-drill.
AB - The a-C:H:Zr-x coatings are deposited on micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering system with pulsed-DC power frequencies in the range 30 kHz to 110 kHz (the x in the term a-C:H:Zr-x is the frequency varied in the deposition process). The hardness of the various coatings is systematically explored. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:Zr-70 coating has the highest hardness (42 GPa), while the a-C:H:Zr-110 coating has the lowest hardness (26 GPa). In addition, it is shown that the a-C:H:Zr-70 coating increases the life of the micro-drill by a factor of three compared to that of an uncoated micro-drill.
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U2 - 10.4028/www.scientific.net/AMR.328-330.861
DO - 10.4028/www.scientific.net/AMR.328-330.861
M3 - Conference contribution
AN - SCOPUS:80053098611
SN - 9783037852385
T3 - Advanced Materials Research
SP - 861
EP - 867
BT - Mechatronics and Materials Processing I
T2 - 2011 International Conference on Mechatronics and Materials Processing, ICMMP 2011
Y2 - 18 November 2011 through 20 November 2011
ER -