Influence of pulsed-DC power frequency on mechanical properties and high speed drilling application of a-C:H:Zr-x coatings

W. H. Kao, Y. L. Su, S. H. Yao, S. H. Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The a-C:H:Zr-x coatings are deposited on micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering system with pulsed-DC power frequencies in the range 30 kHz to 110 kHz (the x in the term a-C:H:Zr-x is the frequency varied in the deposition process). The hardness of the various coatings is systematically explored. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:Zr-70 coating has the highest hardness (42 GPa), while the a-C:H:Zr-110 coating has the lowest hardness (26 GPa). In addition, it is shown that the a-C:H:Zr-70 coating increases the life of the micro-drill by a factor of three compared to that of an uncoated micro-drill.

Original languageEnglish
Title of host publicationMechatronics and Materials Processing I
Pages861-867
Number of pages7
DOIs
Publication statusPublished - 2011 Sep 28
Event2011 International Conference on Mechatronics and Materials Processing, ICMMP 2011 - Guangzhou, China
Duration: 2011 Nov 182011 Nov 20

Publication series

NameAdvanced Materials Research
Volume328-330
ISSN (Print)1022-6680

Other

Other2011 International Conference on Mechatronics and Materials Processing, ICMMP 2011
CountryChina
CityGuangzhou
Period11-11-1811-11-20

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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