Influence of substrate bias on practical adhesion, toughness, and roughness of reactive de-sputtered zirconium nitride films

Cheng Shi Chen, Chuan Pu Liu, Heng Ghieh Yang, C. Y.A. Tsao

Research output: Contribution to journalReview articlepeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)2041-2047
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
Publication statusPublished - 2004 Oct 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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