@article{d569c9108cc6478996db21fc81facd10,
title = "Influence of the preferred orientation and thickness of zirconium nitride films on the diffusion property in copper",
author = "Chen, {Cheng Shi} and Liu, {Chuan Pu} and Yang, {Heng Ghieh} and Tsao, {Chi Y.A.}",
year = "2004",
month = jul,
day = "1",
doi = "10.1116/1.1738669",
language = "English",
volume = "22",
pages = "1075--1083",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
number = "3",
}