Influence of the preferred orientation and thickness of zirconium nitride films on the diffusion property in copper

Cheng Shi Chen, Chuan Pu Liu, Heng Ghieh Yang, Chi Y.A. Tsao

Research output: Contribution to journalArticle

35 Citations (Scopus)
Original languageEnglish
Pages (from-to)1075-1083
Number of pages9
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
Publication statusPublished - 2004 Jul 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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