Influence of zr doping on the tribological properties of amorphous carbon-nitride coating

Yan Liang Su, Sun Hui Yao, Yu Chen Lai, Huang Ming Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nano-hardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nano-hardness was increased and the wear performance was largely improved.

Original languageEnglish
Title of host publicationEngineering Tribology and Materials III
EditorsYunn Lin Hwang
PublisherTrans Tech Publications Ltd
Pages9-14
Number of pages6
ISBN (Print)9783035714623
DOIs
Publication statusPublished - 2019 Jan 1
Event4th International Conference on Engineering Tribology and Applied Technology, ICETAT 2018 - Taipei, Taiwan
Duration: 2018 Nov 162018 Nov 18

Publication series

NameKey Engineering Materials
Volume823 KEM
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference4th International Conference on Engineering Tribology and Applied Technology, ICETAT 2018
CountryTaiwan
CityTaipei
Period18-11-1618-11-18

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Su, Y. L., Yao, S. H., Lai, Y. C., & Wu, H. M. (2019). Influence of zr doping on the tribological properties of amorphous carbon-nitride coating. In Y. L. Hwang (Ed.), Engineering Tribology and Materials III (pp. 9-14). (Key Engineering Materials; Vol. 823 KEM). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.823.9