TY - GEN
T1 - Influence of zr doping on the tribological properties of amorphous carbon-nitride coating
AU - Su, Yan Liang
AU - Yao, Sun Hui
AU - Lai, Yu Chen
AU - Wu, Huang Ming
N1 - Funding Information:
We thank Minister of Science and Technology (MOST) for funding this study under project number: MOST 105-2221-E-006-071-.
Publisher Copyright:
© 2019 Trans Tech Publications Ltd, Switzerland
PY - 2019
Y1 - 2019
N2 - This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nano-hardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nano-hardness was increased and the wear performance was largely improved.
AB - This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nano-hardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nano-hardness was increased and the wear performance was largely improved.
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U2 - 10.4028/www.scientific.net/KEM.823.9
DO - 10.4028/www.scientific.net/KEM.823.9
M3 - Conference contribution
AN - SCOPUS:85079903476
SN - 9783035714623
T3 - Key Engineering Materials
SP - 9
EP - 14
BT - Engineering Tribology and Materials III
A2 - Hwang, Yunn Lin
PB - Trans Tech Publications Ltd
T2 - 4th International Conference on Engineering Tribology and Applied Technology, ICETAT 2018
Y2 - 16 November 2018 through 18 November 2018
ER -