Love wave acoustic devices are very promising in biosensors applications in liquid environments because of their high sensitivity. ZnO films with c-axis orientated crystalline structure have been grown successfully on 90°-rotated ST-cut quartz by r.f. sputtering technique. In this paper, a Love mode sensor with two-port interdigital transducer and reflector grating structure is reported. Frequency response with narrower bandwidth and higher sensitivity has been achieved.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry