Influences of reflector gratings on the properties of love wave acoustic sensors in ZnO/quartz structure

Sheng-Yuan Chu, Walter Water

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Love wave acoustic devices are very promising in biosensors applications in liquid environments because of their high sensitivity. ZnO films with c-axis orientated crystalline structure have been grown successfully on 90°-rotated ST-cut quartz by r.f. sputtering technique. In this paper, a Love mode sensor with two-port interdigital transducer and reflector grating structure is reported. Frequency response with narrower bandwidth and higher sensitivity has been achieved.

Original languageEnglish
Pages (from-to)121-125
Number of pages5
JournalIntegrated Ferroelectrics
Volume51
DOIs
Publication statusPublished - 2003 Dec 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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