Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction

Chi Cuong Nguyen, Vo Ke Thanh Ngo, Hoai Quoc Le, Wang-Long Li

Research output: Contribution to journalArticle

Abstract

In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of gas rarefaction (ambient pressure and accommodation coefficients, ACs). The modified molecular gas lubrication (MMGL) equation is used to model the squeeze film damping problem of MEMS cantilever resonators. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation to consider the coupled effects of relative humidity and gas rarefaction. Thermoelastic damping and anchor loss, which are dominant damping mechanisms of MEMS cantilever resonators, are also included to calculate total Q factor. Thus, the influences of relative humidity are discussed on the Q factors of MEMS cantilever resonators in wide range of gas rarefaction and dimension of cantilever. The results showed that the Q factor decreases as relative humidity increases in wide range of gas rarefaction (pressure, and ACs) and dimension of cantilever (length, width, and thickness). The influences of relative humidity on the Q factor become more significantly in larger length, larger width, smaller thickness of cantilever, and higher gas rarefaction (lower pressure and ACs). Whereas, the influences of relative humidity on the Q factor reduce or are neglected in smaller length, larger thickness of cantilever and lower gas rarefaction (higher pressure and ACs).

Original languageEnglish
Pages (from-to)2767-2782
Number of pages16
JournalMicrosystem Technologies
Volume25
Issue number7
DOIs
Publication statusPublished - 2019 Jul 9

Fingerprint

rarefaction
humidity
accommodation coefficient
Q factors
Resonators
Atmospheric humidity
Gases
resonators
gases
damping
molecular gases
lubrication
Damping
squeeze films
Lubrication
laminar flow
low pressure
flow velocity
Anchors
viscosity

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Nguyen, Chi Cuong ; Ngo, Vo Ke Thanh ; Le, Hoai Quoc ; Li, Wang-Long. / Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction. In: Microsystem Technologies. 2019 ; Vol. 25, No. 7. pp. 2767-2782.
@article{19c40dcc68c447dfa53e8054d5dc9fa6,
title = "Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction",
abstract = "In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of gas rarefaction (ambient pressure and accommodation coefficients, ACs). The modified molecular gas lubrication (MMGL) equation is used to model the squeeze film damping problem of MEMS cantilever resonators. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation to consider the coupled effects of relative humidity and gas rarefaction. Thermoelastic damping and anchor loss, which are dominant damping mechanisms of MEMS cantilever resonators, are also included to calculate total Q factor. Thus, the influences of relative humidity are discussed on the Q factors of MEMS cantilever resonators in wide range of gas rarefaction and dimension of cantilever. The results showed that the Q factor decreases as relative humidity increases in wide range of gas rarefaction (pressure, and ACs) and dimension of cantilever (length, width, and thickness). The influences of relative humidity on the Q factor become more significantly in larger length, larger width, smaller thickness of cantilever, and higher gas rarefaction (lower pressure and ACs). Whereas, the influences of relative humidity on the Q factor reduce or are neglected in smaller length, larger thickness of cantilever and lower gas rarefaction (higher pressure and ACs).",
author = "Nguyen, {Chi Cuong} and Ngo, {Vo Ke Thanh} and Le, {Hoai Quoc} and Wang-Long Li",
year = "2019",
month = "7",
day = "9",
doi = "10.1007/s00542-018-4239-x",
language = "English",
volume = "25",
pages = "2767--2782",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "7",

}

Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction. / Nguyen, Chi Cuong; Ngo, Vo Ke Thanh; Le, Hoai Quoc; Li, Wang-Long.

In: Microsystem Technologies, Vol. 25, No. 7, 09.07.2019, p. 2767-2782.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction

AU - Nguyen, Chi Cuong

AU - Ngo, Vo Ke Thanh

AU - Le, Hoai Quoc

AU - Li, Wang-Long

PY - 2019/7/9

Y1 - 2019/7/9

N2 - In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of gas rarefaction (ambient pressure and accommodation coefficients, ACs). The modified molecular gas lubrication (MMGL) equation is used to model the squeeze film damping problem of MEMS cantilever resonators. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation to consider the coupled effects of relative humidity and gas rarefaction. Thermoelastic damping and anchor loss, which are dominant damping mechanisms of MEMS cantilever resonators, are also included to calculate total Q factor. Thus, the influences of relative humidity are discussed on the Q factors of MEMS cantilever resonators in wide range of gas rarefaction and dimension of cantilever. The results showed that the Q factor decreases as relative humidity increases in wide range of gas rarefaction (pressure, and ACs) and dimension of cantilever (length, width, and thickness). The influences of relative humidity on the Q factor become more significantly in larger length, larger width, smaller thickness of cantilever, and higher gas rarefaction (lower pressure and ACs). Whereas, the influences of relative humidity on the Q factor reduce or are neglected in smaller length, larger thickness of cantilever and lower gas rarefaction (higher pressure and ACs).

AB - In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of gas rarefaction (ambient pressure and accommodation coefficients, ACs). The modified molecular gas lubrication (MMGL) equation is used to model the squeeze film damping problem of MEMS cantilever resonators. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation to consider the coupled effects of relative humidity and gas rarefaction. Thermoelastic damping and anchor loss, which are dominant damping mechanisms of MEMS cantilever resonators, are also included to calculate total Q factor. Thus, the influences of relative humidity are discussed on the Q factors of MEMS cantilever resonators in wide range of gas rarefaction and dimension of cantilever. The results showed that the Q factor decreases as relative humidity increases in wide range of gas rarefaction (pressure, and ACs) and dimension of cantilever (length, width, and thickness). The influences of relative humidity on the Q factor become more significantly in larger length, larger width, smaller thickness of cantilever, and higher gas rarefaction (lower pressure and ACs). Whereas, the influences of relative humidity on the Q factor reduce or are neglected in smaller length, larger thickness of cantilever and lower gas rarefaction (higher pressure and ACs).

UR - http://www.scopus.com/inward/record.url?scp=85057528109&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85057528109&partnerID=8YFLogxK

U2 - 10.1007/s00542-018-4239-x

DO - 10.1007/s00542-018-4239-x

M3 - Article

AN - SCOPUS:85057528109

VL - 25

SP - 2767

EP - 2782

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 7

ER -