Influences of temperature on the quality factors of micro-beam resonators in gas rarefaction

Chi Cuong Nguyen, Wang-Long Li

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this study, the effect of temperature on the quality factor (Q-factor) of a micro-beam resonator is analyzed in a wide range of gas rarefaction conditions (ambient pressure and accommodation coefficients (ACs)). Squeeze film damping (SFD), thermoelastic damping (TED), and anchor loss, which are dominant damping mechanisms of micro-beam resonators, are included in the total Q-factor. The increase in the mean free path of gas with temperature is more significant than that of the gas viscosity in high gas rarefaction. Thus, the effect of temperature in gas rarefaction is discussed to improve the Q-factors of the resonators. The modified molecular gas lubrication (MMGL) equation is utilized to model SFD. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation considering the coupled effects of temperature and gas rarefaction. Finally, the effect of temperature on the Q-factors is discussed under various gas rarefaction conditions (pressure and ACs), types of gases and resonator modes. The results show that the Q-factor increases with temperature in higher gas rarefaction (lower pressure and ACs), whereas the Q-factor decreases as temperature increases in lower gas rarefaction (higher pressure and ACs). The decrease in the Q-factor with temperature is improved by the gas rarefaction effect. Furthermore, the Q-factor of a micro-beam resonator increases considerably with temperature by using hydrogen in higher gas rarefaction and the 1st mode of the resonator.

Original languageEnglish
Pages (from-to)151-165
Number of pages15
JournalSensors and Actuators, A: Physical
Volume261
DOIs
Publication statusPublished - 2017 Jul 1

Fingerprint

rarefaction
Q factors
Resonators
Gases
resonators
gases
accommodation coefficient
Temperature
temperature
damping
squeeze films
Damping
molecular gases
lubrication
Lubrication
gas viscosity
Viscosity of gases
laminar flow
mean free path
Anchors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

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title = "Influences of temperature on the quality factors of micro-beam resonators in gas rarefaction",
abstract = "In this study, the effect of temperature on the quality factor (Q-factor) of a micro-beam resonator is analyzed in a wide range of gas rarefaction conditions (ambient pressure and accommodation coefficients (ACs)). Squeeze film damping (SFD), thermoelastic damping (TED), and anchor loss, which are dominant damping mechanisms of micro-beam resonators, are included in the total Q-factor. The increase in the mean free path of gas with temperature is more significant than that of the gas viscosity in high gas rarefaction. Thus, the effect of temperature in gas rarefaction is discussed to improve the Q-factors of the resonators. The modified molecular gas lubrication (MMGL) equation is utilized to model SFD. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation considering the coupled effects of temperature and gas rarefaction. Finally, the effect of temperature on the Q-factors is discussed under various gas rarefaction conditions (pressure and ACs), types of gases and resonator modes. The results show that the Q-factor increases with temperature in higher gas rarefaction (lower pressure and ACs), whereas the Q-factor decreases as temperature increases in lower gas rarefaction (higher pressure and ACs). The decrease in the Q-factor with temperature is improved by the gas rarefaction effect. Furthermore, the Q-factor of a micro-beam resonator increases considerably with temperature by using hydrogen in higher gas rarefaction and the 1st mode of the resonator.",
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Influences of temperature on the quality factors of micro-beam resonators in gas rarefaction. / Nguyen, Chi Cuong; Li, Wang-Long.

In: Sensors and Actuators, A: Physical, Vol. 261, 01.07.2017, p. 151-165.

Research output: Contribution to journalArticle

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AB - In this study, the effect of temperature on the quality factor (Q-factor) of a micro-beam resonator is analyzed in a wide range of gas rarefaction conditions (ambient pressure and accommodation coefficients (ACs)). Squeeze film damping (SFD), thermoelastic damping (TED), and anchor loss, which are dominant damping mechanisms of micro-beam resonators, are included in the total Q-factor. The increase in the mean free path of gas with temperature is more significant than that of the gas viscosity in high gas rarefaction. Thus, the effect of temperature in gas rarefaction is discussed to improve the Q-factors of the resonators. The modified molecular gas lubrication (MMGL) equation is utilized to model SFD. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation considering the coupled effects of temperature and gas rarefaction. Finally, the effect of temperature on the Q-factors is discussed under various gas rarefaction conditions (pressure and ACs), types of gases and resonator modes. The results show that the Q-factor increases with temperature in higher gas rarefaction (lower pressure and ACs), whereas the Q-factor decreases as temperature increases in lower gas rarefaction (higher pressure and ACs). The decrease in the Q-factor with temperature is improved by the gas rarefaction effect. Furthermore, the Q-factor of a micro-beam resonator increases considerably with temperature by using hydrogen in higher gas rarefaction and the 1st mode of the resonator.

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