Abstract
This paper presents a new roller-based nanoimprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting, the patterned metal film defined by sub-micro-and nano-scale features of the mold can be transferred from the mold to the substrate. A glass roller is introduced in this new method. Optically, the glass roller is acting like a cylindrical lens which can focus the infrared light into a line source at the mold/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. In this paper, quartz substrates have been successfully patterned and, after appropriated etching processes, quartz molds are obtained.
| Original language | English |
|---|---|
| Title of host publication | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
| Pages | 779-782 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2009 Oct 12 |
| Event | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 2009 Jan 5 → 2009 Jan 8 |
Publication series
| Name | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
|---|
Other
| Other | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
|---|---|
| Country | China |
| City | Shenzhen |
| Period | 09-01-05 → 09-01-08 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
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Infrared heating and roller-based contact printing technology for the fabrication of micro/nano-structures. / Lee, Yung-Chun; Chen, Hsueh Liang; Chen, Chun Hung; Lin, Hung Yi.
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 779-782 5068694 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Infrared heating and roller-based contact printing technology for the fabrication of micro/nano-structures
AU - Lee, Yung-Chun
AU - Chen, Hsueh Liang
AU - Chen, Chun Hung
AU - Lin, Hung Yi
PY - 2009/10/12
Y1 - 2009/10/12
N2 - This paper presents a new roller-based nanoimprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting, the patterned metal film defined by sub-micro-and nano-scale features of the mold can be transferred from the mold to the substrate. A glass roller is introduced in this new method. Optically, the glass roller is acting like a cylindrical lens which can focus the infrared light into a line source at the mold/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. In this paper, quartz substrates have been successfully patterned and, after appropriated etching processes, quartz molds are obtained.
AB - This paper presents a new roller-based nanoimprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting, the patterned metal film defined by sub-micro-and nano-scale features of the mold can be transferred from the mold to the substrate. A glass roller is introduced in this new method. Optically, the glass roller is acting like a cylindrical lens which can focus the infrared light into a line source at the mold/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. In this paper, quartz substrates have been successfully patterned and, after appropriated etching processes, quartz molds are obtained.
UR - http://www.scopus.com/inward/record.url?scp=70349673957&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349673957&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2009.5068694
DO - 10.1109/NEMS.2009.5068694
M3 - Conference contribution
SN - 9781424446308
T3 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
SP - 779
EP - 782
BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
ER -