InGaAsN metal-semiconductor-metal photodetectors with transparent indium tin oxide schottky contacts

Yan Kuin Su, Wei Cheng Chen, Ricky W. Chuang, Shuo Hsien Hsu, Bing Yang Chen

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1 Citation (Scopus)


GaAs-based photodetectors (PDs) draw much attention owing to several advantages, such as low fabrication cost and the mature process techniques. However, fabricating them is a difficult task for the lack of suitable absorption materials that can be coherently grown on the GaAs substrate. In this report, we provide another approach to fabricate GaAs-based PDs, in which the novel InGaAsN alloy is used as the absorption layer. Three structures of planar PDs were demonstrated using transparent indium tin oxide (ITO) contacts. The dark current of PDs were suppressed by applying the SiO2 Schottky-barrier enhancement layer, but the rough interface between the SiO 2 and InGaAsN layer limited the device characteristics. Depositing a thin layer of ITO between the SiO2 and InGaAsN layers greatly improved the interface quality and the photo current-to-dark current ratio was also increased from 1.7.7 to 45.29 under 0.5 V bias.

Original languageEnglish
Pages (from-to)2373-2376
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number4 B
Publication statusPublished - 2007 Apr 24

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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