Abstract
10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.
| Original language | English |
|---|---|
| Pages (from-to) | 1495-1497 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 12 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 2000 Nov 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
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InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters. / Ma, Yong; Chang, Shih-hui; Park, Seoijin; Wang, Liwei; Ho, Seng Tiong.
In: IEEE Photonics Technology Letters, Vol. 12, No. 11, 01.11.2000, p. 1495-1497.Research output: Contribution to journal › Article
TY - JOUR
T1 - InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters
AU - Ma, Yong
AU - Chang, Shih-hui
AU - Park, Seoijin
AU - Wang, Liwei
AU - Ho, Seng Tiong
PY - 2000/11/1
Y1 - 2000/11/1
N2 - 10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.
AB - 10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.
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U2 - 10.1109/68.887713
DO - 10.1109/68.887713
M3 - Article
VL - 12
SP - 1495
EP - 1497
JO - IEEE Photonics Technology Letters
JF - IEEE Photonics Technology Letters
SN - 1041-1135
IS - 11
ER -