InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

Yong Ma, Shih-hui Chang, Seoijin Park, Liwei Wang, Seng Tiong Ho

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

Original languageEnglish
Pages (from-to)1495-1497
Number of pages3
JournalIEEE Photonics Technology Letters
Volume12
Issue number11
DOIs
Publication statusPublished - 2000 Nov 1

Fingerprint

Wafer bonding
Linewidth
Resonators
Polymers
resonators
wafers
filters
Thin films
Wavelength
Light propagation
polymers
thin films
wavelengths
division
Waveguides
waveguides
propagation
benzocyclobutene

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Ma, Yong ; Chang, Shih-hui ; Park, Seoijin ; Wang, Liwei ; Ho, Seng Tiong. / InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters. In: IEEE Photonics Technology Letters. 2000 ; Vol. 12, No. 11. pp. 1495-1497.
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InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters. / Ma, Yong; Chang, Shih-hui; Park, Seoijin; Wang, Liwei; Ho, Seng Tiong.

In: IEEE Photonics Technology Letters, Vol. 12, No. 11, 01.11.2000, p. 1495-1497.

Research output: Contribution to journalArticle

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