InGaZnO metal-base transistor with high current gain

H. Y. Huang, S. J. Wang, C. H. Hung, C. H. Wu, W. C. Lin

Research output: Contribution to journalArticlepeer-review


The fabrication of metal-base transistors (MBTs) based on InGaZnO at room temperature is reported for the first time. With a suitable oxygen doping to the sputtering-deposited InGaZnO film and an HfSiO interlayer, improved diode performances with enhanced Schottky barrier heights of 0.70 and 0.66 eV are obtained for the base/collector (Ti/InGaZnO) and base/emitter (Au/HfSiO/InGaZnO) junctions, respectively. InGaZnO MBT using a Ti(10 nm)/Au(10 m)/HfSiO(5 nm) dual metal base shows a high common-emitter current gain (β) 840-310 at VCE = 2 V and IB ranging from 1 to 10 nA.

Original languageEnglish
Pages (from-to)1465-1467
Number of pages3
JournalElectronics Letters
Issue number20
Publication statusPublished - 2014 Sept 25

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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