Abstract
In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μm̃0.05μm can be achieved, and the maximum error is about 0.1μm.
| Original language | English |
|---|---|
| Article number | 73754M |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 7375 |
| DOIs | |
| Publication status | Published - 2009 Dec 1 |
| Event | International Conference on Experimental Mechanics 2008, ICEM 2008 - Nanjing, China Duration: 2008 Nov 8 → 2008 Nov 8 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
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Instantaneous surface profile measurement using polarized phase-shifting. / Chen, Terry Yuan Fang; Du, Yi Liang.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 7375, 73754M, 01.12.2009.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Instantaneous surface profile measurement using polarized phase-shifting
AU - Chen, Terry Yuan Fang
AU - Du, Yi Liang
PY - 2009/12/1
Y1 - 2009/12/1
N2 - In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μm̃0.05μm can be achieved, and the maximum error is about 0.1μm.
AB - In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μm̃0.05μm can be achieved, and the maximum error is about 0.1μm.
UR - http://www.scopus.com/inward/record.url?scp=77049107976&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77049107976&partnerID=8YFLogxK
U2 - 10.1117/12.839312
DO - 10.1117/12.839312
M3 - Conference article
AN - SCOPUS:77049107976
VL - 7375
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
M1 - 73754M
ER -