Instantaneous surface profile measurement using polarized phase-shifting

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5 Citations (Scopus)


In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μm̃0.05μm can be achieved, and the maximum error is about 0.1μm.

Original languageEnglish
Article number73754M
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2009 Dec 1
EventInternational Conference on Experimental Mechanics 2008, ICEM 2008 - Nanjing, China
Duration: 2008 Nov 82008 Nov 8

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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