Integrated SiO2/SiON/SiO2 thermo-optical switch based on the multimode interference effect

Ricky W. Chuang, Mao Teng Hsu, Zhen Liang Liao

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2 Citations (Scopus)


We propose the design of an integrated SiO2/SiON/SiO2 2 × 2 multimode interference (MMI) based optical switch. The entire switching mechanism is based on the thermo-optic (TO) effect of SiO 2/SiON dielectric layers. The heating power of ∼0.89Wis required to switch the optical beam from bar to cross state. The experimental crosstalk of the switch as determined betwen the cross and bar states is in the excess of 12 dB. Furthermore, the rise and fall times of approximately 314 ms are also experimentally realized for this device.

Original languageEnglish
Article number04DG21
JournalJapanese journal of applied physics
Issue number4 PART 2
Publication statusPublished - 2010 Apr 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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