Fingerprint
Dive into the research topics of 'Interfacial characteristics of copper/diffusion barrier/low dielectric constant material systems at elevated temperatures'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Interfacial characteristics of copper/diffusion barrier/low dielectric constant material systems at elevated temperatures
J. S. Chen, J. S. Jeng, C. C. Chang
Research output: Contribution to conference › Paper › peer-review
1
Citation
(Scopus)