Interfacial reactions of W thin film on single-crystal (001) β-SiC

Keyphrases

• Single Crystal 100%
• X Ray Diffraction 100%
• Interfacial Reaction 100%
• Backscattering Spectrometry 100%
• As-deposited 50%
• Ohmic Contact 50%
• Secondary Ion Mass Spectrometry 50%
• Rapid Thermal Annealing 50%
• Phase Stability 50%
• Solid Phase 50%
• Current-voltage Measurements 50%
• Cross-sectional Transmission Electron Microscopy 50%
• Thermodynamic Study 50%
• Chemical Stability 50%
• SiC Substrate 50%
• W5Si3 50%
• Contact Resistivity 50%
• Circular Transmission Line Model 50%

Physics

• Thin Films 100%
• Single Crystal 100%
• X Ray Diffraction 66%
• Backscattering 66%
• Transmission Electron Microscopy 33%
• Secondary Ion Mass Spectrometry 33%
• Transmission Line 33%